Hydrogen features in a number of sensitive semiconductor processes where the control of impurities into the sub part-per-billion (ppb) range has a critical impact on device function or yield.  Power+Energy suggest using HEMS™ instruments to verify hydrogen purity prior to its introduction into key processing steps.  Unlike other analysis method, our Hydrogen Elimination Measurement System is automatic and developed to detect ppb levels of any impurity under 100 AMU (atomic mass units).

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Semiconductor Processing Hydrogen